- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/067 - Replacing parts of guns; Mutual adjustment of electrodes
Patent holdings for IPC class H01J 37/067
Total number of patents in this class: 20
10-year publication summary
|
1
|
1
|
0
|
3
|
2
|
2
|
2
|
0
|
1
|
0
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Hitachi High-Technologies Corporation | 2034 |
2 |
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
2 |
| Mapper Lithography IP B.V. | 136 |
2 |
| Aquasium Technology Limited | 14 |
2 |
| Mitsubishi Heavy Industries, Ltd. | 8217 |
1 |
| Axcelis Technologies, Inc. | 429 |
1 |
| Denka Company Limited | 2189 |
1 |
| FEI Company | 851 |
1 |
| Ibis Technology Corporation | 2 |
1 |
| JEOL Ltd. | 556 |
1 |
| KLA-Tencor Corporation | 2574 |
1 |
| Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V. | 1657 |
1 |
| National Center for Nanoscience and Technology, China | 35 |
1 |
| Leybold GmbH | 293 |
1 |
| Hitachi High-Tech Corporation | 4424 |
1 |
| Thales Deutschland GmbH Electron Devices | 5 |
1 |
| Other owners | 0 |